Zinc oxide doped with silicon oxide sputtering targets(ZnO-SiO2)产品概况

As a new wide band gap semiconductor material, ZnO is not only rich in raw materials, non-toxic, but also has excellent photoelectric, piezoelectric, gas sensitivity and other properties, which makes it easy to realize doping. ZnO doped SiO2 film has good hardness, optical, dielectric properties, wear resistance, corrosion resistance, mechanical and other properties, and has broad application prospects in optical, microelectronic and other fields